File Name: wet etching and dry etching .zip
Metrics details. Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications in the field of microelectromechanical systems MEMS. In addition, it is most widely used for surface texturing to minimize the reflectance of light to improve the efficiency of crystalline silicon solar cells.
The etch process removes selected areas from the surface of the wafer so that other materials may be deposited. Typically, part of the wafer is protected during the etch by an etch-resistant "masking" material, such as photoresist or a hard mask such as silicon nitride. Etch processes are referred to as dielectric etch or conductor etch to indicate the types of films that are removed from the wafer. For example, dielectric etch is employed to etch via holes and trenches for metal conductive paths; conductor etch removes polysilicon to create the gate in a transistor , or aluminum and tungsten to reveal the pattern of circuitry in the device structure.
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride. If the etch is intended to make a cavity in a material, the depth of the cavity may be controlled approximately using the etching time and the known etch rate. More often, though, etching must entirely remove the top layer of a multilayer structure, without damaging the underlying or masking layers.
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If directionality is very important for high-resolution pattern transfer, wet chemical etching is normally not used. Dry Etch: Synonyms: plasma etching, gas etching.
Skip to Main Content. A not-for-profit organization, IEEE is the world's largest technical professional organization dedicated to advancing technology for the benefit of humanity. Use of this web site signifies your agreement to the terms and conditions. Crystalline anisotropic dry etching for single crystal silicon Abstract: This paper describes the possibility of the crystalline anisotropic etching of single-crystal silicon using a fully dry etching process. Conventionally, the crystalline anisotropic etching of silicon has been achieved only using specific wet solutions.
Folder Name. Folder Description. Wet etching.
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